Modeling study on the surface morphology evolution during removing the optics surface/subsurface damage using atmospheric pressure plasma processing

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DOI:10.1016/j.apsusc.2016.04.157
作者：Qiang Xin, Xing Su, Bo Wang
文献类型：期刊论文
补充材料：只需要正文
文献链接：https://doi.org/10.1016/j.apsusc.2016.04.157

Elsevier

Abstract：Plasma processing has been widely reported as an effective tool in relieving or removing surface/subsurface damage induced by previous mechanical machining process. However, the surface morp

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