A Prediction Method of the Removal Function for Inductively Coupled Atmospheric Pressure Plasma Processing Based on Jet Morphology Monitoring and Diagnosis

已完结 10 由 Tina 发布于 2024/12/1 15:29:42

DOI:10.1007/s11090-022-10247-1
文献类型：期刊论文
补充材料：只需要正文
文献链接：https://doi.org/10.1016/j.precisioneng.2020.05.015

Elsevier

Abstract：Inductively coupled atmospheric pressure plasma processing (IC-APPP) is a promising technique of generating freeform surfaces of silicon-based optics. A constant removal function related to

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