Preferential sputtering of metal oxide mixture thin films

待确认 10 由 liangyi123 发布于 2024/10/12 15:14:31

DOI:10.1116/6.0000799
作者：M. Mende,?F. Carstens,?H. Ehlers,?D. Ristau
文献类型：期刊论文
补充材料：只需要正文

American Institute of Physics (AIP)

Abstract：Metal oxide mixture materials enable the production of dielectric multilayer coatings for highest power laser applications. During thin film deposition, when using sputtering techniques in c

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