Enhancing the temperature coefficient of resistance of Pt thin film resistance-temperature-detector by short-time annealing

已完结 10 由 LLcute 发布于 2024/10/25 13:41:12

DOI:10.1016/j.ceramint.2022.12.122
作者：Ruina Jiao , Kunlun Wang , Yanqing Xin , Hui Sun , Jianhong Gong , Lan Yu , Yong Wang
文献类型：期刊论文
补充材料：只需要正文

Elsevier

Abstract：In this work, we report the influence of annealing time on the electrical properties of Pt thin film resistance-temperature-detectors (RTD) with Ti adhesion layers. It is found that the temp

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