A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection

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DOI:10.1109/TSM.2023.3327767
文献类型：期刊论文
补充材料：只需要正文
文献链接：https://doi.org/10.1109/TSM.2023.3327767

Institute of Electrical and Electronics Engineers (IEEE)

Abstract：Single-image super-resolution (SISR) techniques have found wide applications in semiconductor defect inspection. Enhancing image resolution to improve inspection sensitivity and accuracy hol

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