Vertically Integrated Self-Monitoring AlGaN-Based Deep Ultraviolet Micro-LED Array with Photodetector Via a Transparent Sapphire Substrate Toward Stable and Compact Maskless Photolithography Application

已完结 10 由 herwin 发布于 2024/10/28 11:23:03

DOI:10.1002/lpor.202401220
作者：Huabin Yu, Jikai Yao, Muhammad Hunain Memon, Yuanmin Luo, Zhixiang Gao, Dongyang Luo, Rui Wang, Zixun Wang, Wei Chen, Linjun Wang, Shuiqing Li, Jinjian Zheng, Jiangyong Zhang, Sheng Liu, Haiding Sun
文献类型：期刊论文
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Wiley

Abstract：Drawing inspiration from modern integrated circuit systems composed of various electronic components built on a single silicon platform, the emerging integrated photonics can also follow a s

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