Preparation and Optical Properties of TiO2/SiO2 bilayer antireflection film

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DOI:10.1016/j.optmat.2021.111594
作者：Leran Zhao ,?Changjiang Zhao ,?Luoshu Wang ,?Xiaowei Fan ,?Qingguo Wang ,?Juncheng Liu
文献类型：期刊论文
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Abstract：TiO2 films were deposited on monocrystalline silicon wafers with radio frequency (RF) magnetron sputtering, and the effects of O2 flow ratio on the films' stoichiometric ratio, phase composi

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