Evaluation of Lattice-Spacing of SiGe/Si by NBD using Two-condenser-lens TEM

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DOI:10.1017/S1431927622010601
作者：J. Yamanaka, Takuya Oguni, Y. Sano, Yusuke Ohshima, Atsushi Onogawa, K. Hara, K. Arimoto
文献类型：其他 (专利、报告等)
补充材料：只需要正文
文献链接：https://doi.org/10.1017/S1431927622010601

Oxford University Press

Abstract：Nano-beam electron diffraction (NBD) is one of the important methods to collect crystallographic information from nanometer-order area. There are many attractive reports that NBD technique,

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