Passivation Improvement of Poly-SiOx Based TOPCon Contacts by Thermal Annealing in a Water Vapor Atmosphere: Mechanism Exploration and Application Research

已完结 10 由 hank 发布于 2024/1/24 16:39:51

DOI:10.1002/aenm.202300201
文献类型：学位论文
补充材料：只需要正文

Wiley

Abstract：Post-treatment techniques of tunnel oxide passivated contact (TOPCon) structure are universally implemented via executing an additional hydrogenation process to optimize the passivation perf

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