Comparison of different piezoelectric materials for GHz acoustic microscopy transducers

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DOI:10.1109/ULTSYM.2009.5442024
作者：A. Jakob, M. Bender, T. Knoll, R. Lemor, Q. Zhou, B. Zhu, J. Han, K. Shung, T. Lehnert, M. Koch, M. Veith
文献类型：期刊论文
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Abstract：Today acoustic microscopy transducers are based on zinc oxide, ZnO, films as piezoelectric material. Especially in the GHz range the insertion loss of existing ZnO transducers has to be impr

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