Scalable integration of hybrid high-κ dielectric materials on two-dimensional semiconductors

已完结 10 由龙傲天发布于 2024/6/3 14:42:33

DOI:10.1038/s41563-023-01626-w
作者：Yongshan Xu, Teng Liu, Kailang Liu, Yinghe Zhao, Lei Liu, Penghui Li, Anmin Nie, Lixin Liu, Jun Yu, Xin Feng, Fuwei Zhuge, Huiqiao Li, Xinran Wang, Tianyou Zhai
文献类型：期刊论文
补充材料：只需要正文

Nature

Abstract：Two-dimensional (2D) semiconductors are promising channel materials for next-generation field-effect transistors (FETs). However, it remains challenging to integrate ultrathin and uniform hi

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