用于乙炔痕量气体测量的微型光声电池中的多mems -麦克风方案。

IF 1.7 4区 工程技术 Q3 OPTICS
Applied optics Pub Date : 2023-02-20 DOI:10.1364/AO.481824
Qing He, Weirun Zhu, Haifei Lv, Xiaoyan Wen, Zhexuan Zheng, Jiafu Wang, Min Li
{"title":"用于乙炔痕量气体测量的微型光声电池中的多mems -麦克风方案。","authors":"Qing He,&nbsp;Weirun Zhu,&nbsp;Haifei Lv,&nbsp;Xiaoyan Wen,&nbsp;Zhexuan Zheng,&nbsp;Jiafu Wang,&nbsp;Min Li","doi":"10.1364/AO.481824","DOIUrl":null,"url":null,"abstract":"<p><p>Dissolved gas analysis is a strong tool for online health monitoring of electrical power equipment. The industry's large-scale deployment of photoacoustic (PA) sensors is still constrained by cost and sensitivity, despite the great accuracy achieved with a mid-infrared light source or optical sensors. We provide a low-cost PA sensor for ppb-level trace gas sensing based on a near-infrared distributed feedback laser source, miniature gas cell, and multiple microelectromechanical system (MEMS) microphones. Five multi-MEMS-microphones schemes are modeled. The simulation indicates that the sensor, including two MEMS microphones in the center of the resonator, is the most cost-efficient option. The experiments that present this scheme can be realized easily by modifying a traditional single microphone PA cell and with ppb-level sensitivity.</p>","PeriodicalId":8092,"journal":{"name":"Applied optics","volume":"62 6","pages":"1647-1653"},"PeriodicalIF":1.7000,"publicationDate":"2023-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Multi-MEMS-microphone schemes in a miniature photoacoustic cell for acetylene trace gas measurement.\",\"authors\":\"Qing He,&nbsp;Weirun Zhu,&nbsp;Haifei Lv,&nbsp;Xiaoyan Wen,&nbsp;Zhexuan Zheng,&nbsp;Jiafu Wang,&nbsp;Min Li\",\"doi\":\"10.1364/AO.481824\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>Dissolved gas analysis is a strong tool for online health monitoring of electrical power equipment. The industry's large-scale deployment of photoacoustic (PA) sensors is still constrained by cost and sensitivity, despite the great accuracy achieved with a mid-infrared light source or optical sensors. We provide a low-cost PA sensor for ppb-level trace gas sensing based on a near-infrared distributed feedback laser source, miniature gas cell, and multiple microelectromechanical system (MEMS) microphones. Five multi-MEMS-microphones schemes are modeled. The simulation indicates that the sensor, including two MEMS microphones in the center of the resonator, is the most cost-efficient option. The experiments that present this scheme can be realized easily by modifying a traditional single microphone PA cell and with ppb-level sensitivity.</p>\",\"PeriodicalId\":8092,\"journal\":{\"name\":\"Applied optics\",\"volume\":\"62 6\",\"pages\":\"1647-1653\"},\"PeriodicalIF\":1.7000,\"publicationDate\":\"2023-02-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Applied optics\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1364/AO.481824\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied optics","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1364/AO.481824","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"OPTICS","Score":null,"Total":0}
引用次数: 0

摘要

溶解气体分析是电力设备在线健康监测的有力工具。尽管中红外光源或光学传感器具有很高的精度,但业界大规模部署光声(PA)传感器仍然受到成本和灵敏度的限制。我们基于近红外分布式反馈激光源、微型气体池和多个微机电系统(MEMS)麦克风,提供了一种低成本的ppb级微量气体传感器。对五种多mems麦克风方案进行了建模。仿真结果表明,在谐振器中心安装两个MEMS麦克风的传感器是最具成本效益的方案。通过对传统的单传声器扩音单元进行改造,实现了ppb级灵敏度的实验。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Multi-MEMS-microphone schemes in a miniature photoacoustic cell for acetylene trace gas measurement.

Dissolved gas analysis is a strong tool for online health monitoring of electrical power equipment. The industry's large-scale deployment of photoacoustic (PA) sensors is still constrained by cost and sensitivity, despite the great accuracy achieved with a mid-infrared light source or optical sensors. We provide a low-cost PA sensor for ppb-level trace gas sensing based on a near-infrared distributed feedback laser source, miniature gas cell, and multiple microelectromechanical system (MEMS) microphones. Five multi-MEMS-microphones schemes are modeled. The simulation indicates that the sensor, including two MEMS microphones in the center of the resonator, is the most cost-efficient option. The experiments that present this scheme can be realized easily by modifying a traditional single microphone PA cell and with ppb-level sensitivity.

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来源期刊
Applied optics
Applied optics OPTICS-
CiteScore
3.70
自引率
15.80%
发文量
2081
审稿时长
3 months
期刊介绍: A highly regarded, premium quality must read for everyone in the optics field that offers applications-centered research in optics, photonics, imaging, and sensing. Topics germane to the journal include optical technology, lasers, photonics, environmental optics, and information processing.
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