一种热气动驱动的倾斜式活塞镜

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI:10.1109/SENSOR.2007.4300435

A. Werber, H. Zappe

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引用次数: 3

摘要

我们提出了一个新的，高冲程尖端倾斜活塞微镜由热气动力驱动。一个圆形硅镜板安装在三个气球的顶部，气球由50毫米厚的弹性体膜制成。气球在热气动压力下膨胀，从而驱动镜板进入倾斜和活塞运动。测量到非常大的冲程值为385毫米，以及5度的倾斜角。气球致动器的三角形布局在镜面运动中具有很高的灵活性，包括在任何方向上的倾斜。

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A Thermo-Pneumatically Actuated Tip-Tilt-Piston Mirror

We present a novel, high stroke tip-tilt-piston micro-mirror actuated by thermo-pneumatic forces. A circular silicon mirror plate is mounted on top of three balloons, made of a 50 mum thick elastomer membrane. The balloons are inflated under thermo-pneumatic pressure, thus driving the mirror plate into tip-tilt and piston motion. Very large stroke values of 385 mum as well as tip-tilt angles of 5deg were measured. The triangular arrangement of the balloon actuator yields a high flexibility in mirror motion, including tip-tilt in any direction.

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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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