镁升华法在一维纳米结构上生长薄膜和适形涂层

Q1 Engineering

Nanomanufacturing and Metrology Pub Date : 2022-10-10 DOI:10.3390/nanomanufacturing2040013

Aaron J. Austin, Nate Dice, E. Echeverria, A. Gupta, Jonathan Risner, Halle C. Helfrich, R. Sachan, D. Mcilroy

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引用次数: 1

摘要

提出了一种在450℃下用镁升华法制备二氧化硅纳米弹簧的方法。此外，使用该方法在Si(100)上生长Mg薄膜，以确定衬底形态(纳米级曲率与平面)对Mg涂层界面形态的影响。高分辨率/粉末x射线衍射(HRXRD/PXRD)显示，由于样品暴露于空气中，镁包覆的NS和薄膜都存在镁和MgO。扫描电镜(SEM)和能谱分析(EDS)证实了纳米弹簧上存在Mg。TEM-EDS元素映射验证了Mg均匀性和共形包裹纳米弹簧。通过透射电镜和选择面积电子衍射(SAED)测定了纳米弹簧表面Mg涂层的纳米结晶度为多晶。相比之下，该工艺在平面表面上产生大的微米级晶体。

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Magnesium Sublimation for Growing Thin Films and Conformal Coatings on 1D Nanostructures

A method to conformally coat silica nanosprings with magnesium via sublimation at 450oC has been developed. In addition, Mg thin films were grown on Si(100) using this method to determine the effects of substrate morphology (nanoscale curvatures vs. planar) on the interfacial morphology of the Mg coating. High-resolution/powder X-ray diffraction (HRXRD/PXRD) on both the Mg-coated NS and the thin film revealed the presence of Mgand MgO due to exposure of the samples to air. Scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) confirmed the presence of Mg on the nanosprings. Elemental mapping with TEM-EDS verified that Mg uniformity and conformally coats the nanosprings. Nanocrystallinity of the Mg coating on the nanosprings was determined to be polycrystalline by TEM and selected area electron diffraction (SAED). In contrast, the process produces large micron-scale crystals on planar surfaces.

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来源期刊

Nanomanufacturing and Metrology Materials Science-Materials Science (miscellaneous)

CiteScore

5.40

自引率

0.00%

发文量

期刊介绍： Nanomanufacturing and Metrology is a peer-reviewed, international and interdisciplinary research journal and is the first journal over the world that provides a principal forum for nano-manufacturing and nano-metrology.Nanomanufacturing and Metrology publishes in the forms including original articles, cutting-edge communications, timely review papers, technical reports, and case studies. Special issues devoted to developments in important topics in nano-manufacturing and metrology will be published periodically.Nanomanufacturing and Metrology publishes articles that focus on, but are not limited to, the following areas:• Nano-manufacturing and metrology• Atomic manufacturing and metrology• Micro-manufacturing and metrology• Physics, chemistry, and materials in micro-manufacturing, nano-manufacturing, and atomic manufacturing• Tools and processes for micro-manufacturing, nano-manufacturing and atomic manufacturing