在光刻工艺中使用激光打印机获取光掩模

IF 2.3 4区物理与天体物理 Q2 OPTICS

Fiber and Integrated Optics Pub Date : 2019-09-13 DOI:10.1117/12.2539416

K. Gut, S. Student

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引用次数: 0

摘要

近几十年来，微流体及其相关领域得到了蓬勃发展。为了实现几十微米大小的结构，而不是昂贵的铬光掩膜，在某些情况下，可以使用激光打印机在典型的薄膜上打印图案。这项工作将比较铬面具和激光打印机制作的面具。通过印制在薄膜上的较便宜的掩模获得的结构也将被展示。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The use of laser printers for obtaining photomasks for the photolithography process

For several decades, microfluidics and related fields have been dynamically developing. For the implementation of structures with a size of several dozen micrometers instead of expensive chrome photomasks, in some cases patterns printed on a typical film by laser printers can be used. The work will compare chrome masks and masks made by laser printers. The structures obtained by the less expensive masks printed on the film will also be presented.

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来源期刊

Fiber and Integrated Optics 物理-光学

CiteScore

3.40

自引率

0.00%

发文量

审稿时长

>12 weeks

期刊介绍： Fiber and Integrated Optics , now incorporating the International Journal of Optoelectronics, is an international bimonthly journal that disseminates significant developments and in-depth surveys in the fields of fiber and integrated optics. The journal is unique in bridging the major disciplines relevant to optical fibers and electro-optical devices. This results in a balanced presentation of basic research, systems applications, and economics. For more than a decade, Fiber and Integrated Optics has been a valuable forum for scientists, engineers, manufacturers, and the business community to exchange and discuss techno-economic advances in the field.