tin - al2o3多层膜的制备及结构研究

{"title":"tin - al2o3多层膜的制备及结构研究","authors":"H. Bauer, B. Arnold, K. Bartsch, R. Rennekamp, A. Leonhardt","doi":"10.1016/S0965-9773(99)00400-6","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":18878,"journal":{"name":"Nanostructured Materials","volume":"55 1","pages":"1101-1109"},"PeriodicalIF":0.0000,"publicationDate":"1999-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Manufacturing and structure investigation of TiN-Al2O3-multilayers\",\"authors\":\"H. Bauer, B. Arnold, K. Bartsch, R. Rennekamp, A. Leonhardt\",\"doi\":\"10.1016/S0965-9773(99)00400-6\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":18878,\"journal\":{\"name\":\"Nanostructured Materials\",\"volume\":\"55 1\",\"pages\":\"1101-1109\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nanostructured Materials\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1016/S0965-9773(99)00400-6\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nanostructured Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/S0965-9773(99)00400-6","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}