{"title":"具有聚合物栅极的长寿命多isfet","authors":"K. Tsukada, M. Sebata, Y. Miyahara, H. Miyagi","doi":"10.1016/0250-6874(89)87039-8","DOIUrl":null,"url":null,"abstract":"<div><p>Long-life, integrated multiple-ISFETs with CMOS interface circuits have been developed. The interface circuits are designed for impedance conversion and rapid multiplexing of the signal from each ISFET. Three kinds of ion-selective membranes for sodium, potassium and chloride are formed on the gates and separated by a patterned thick polyimide layer. The poor adhesion of the polymeric membrane to the ISFET gate is improved by selecting the proper plasticizer for use in the membrane. As a result, a chemical response for sodium, potassium and chloride can be obtained for more than two months.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"18 3","pages":"Pages 329-336"},"PeriodicalIF":0.0000,"publicationDate":"1989-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)87039-8","citationCount":"48","resultStr":"{\"title\":\"Long-life multiple-ISFETS with polymeric gates\",\"authors\":\"K. Tsukada, M. Sebata, Y. Miyahara, H. Miyagi\",\"doi\":\"10.1016/0250-6874(89)87039-8\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Long-life, integrated multiple-ISFETs with CMOS interface circuits have been developed. The interface circuits are designed for impedance conversion and rapid multiplexing of the signal from each ISFET. Three kinds of ion-selective membranes for sodium, potassium and chloride are formed on the gates and separated by a patterned thick polyimide layer. The poor adhesion of the polymeric membrane to the ISFET gate is improved by selecting the proper plasticizer for use in the membrane. As a result, a chemical response for sodium, potassium and chloride can be obtained for more than two months.</p></div>\",\"PeriodicalId\":101159,\"journal\":{\"name\":\"Sensors and Actuators\",\"volume\":\"18 3\",\"pages\":\"Pages 329-336\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/0250-6874(89)87039-8\",\"citationCount\":\"48\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Sensors and Actuators\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/0250687489870398\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0250687489870398","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Long-life, integrated multiple-ISFETs with CMOS interface circuits have been developed. The interface circuits are designed for impedance conversion and rapid multiplexing of the signal from each ISFET. Three kinds of ion-selective membranes for sodium, potassium and chloride are formed on the gates and separated by a patterned thick polyimide layer. The poor adhesion of the polymeric membrane to the ISFET gate is improved by selecting the proper plasticizer for use in the membrane. As a result, a chemical response for sodium, potassium and chloride can be obtained for more than two months.
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