压电片结构中薄膜导电性对声波影响的研究

2014 24th International Crimean Conference Microwave & Telecommunication Technology Pub Date : 2014-11-20 DOI:10.1109/CRMICO.2014.6959621

I. Kuznetsova, B. Zaitsev, V. Anisimkin, V. Kolesov, A. Fionov, M. Z. Melikhov, V. Kashin, A. Teplykh

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引用次数: 0

摘要

实验研究了在“YX - LiNbO3 -气隙-玻璃表面沉积的导电膜”中零阶声波在剪切-水平极化下的速度分数变化和衰减。证明了用非接触法测定这种结构薄膜电导率的可能性。

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The investigation of effect of thin films conductivity on the acoustic waves in structures containing piezoelectric plates

The fractional change in velocity and attenuation of the zero-order acoustic wave with shear-horizontal polarization propagating in “YX LiNbO3 - air gap - conducting film deposited of glass surface” are experimentally investigated. The possibility of determination of film conductivity in such structure by the noncontact methods is demonstrated.

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2014 24th International Crimean Conference Microwave & Telecommunication Technology

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