折射率传感器的近红外金属-绝缘体-金属表面等离子体共振

Cam Thi Hong Hoang, T. Ha, V. D. Pham, Q. M. Ngo
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摘要

本文报道了基于金属-绝缘体-金属(MIM)结构的表面等离子体共振(SPR)对折射率传感器的光学特性。在近红外区域工作的MIM-SPR结构由放置在硅衬底上的一层薄硅间隔层和银膜(作为反射器)上的亚波长金图案的横向周期性组成。mimi - spr结构的反射光谱和电场分布可以通过改变其几何性质来调整,并利用Lumerical有限差分时域(FDTD)方法进行了数值研究。在厚度为80 ~ 120 nm的金微盘上制备了间距为1200 ~ 1400 nm的方形晶格结构。这些被认为是金图案的尺寸,即微盘的直径在900纳米到1000纳米之间。所提出的MIM-SPR结构具有每折射率单位(RIU) 370 nm的灵敏度,可适用于各种等离子体传感,特别是折射生物传感器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Near Infrared Metal-insulator-metal Surface Plasmon Resonances for Refractive Index Sensors
This work reports the optical properties of surface plasmon resonance (SPR) based on the metal-insulator-metal (MIM) structure towards a refractive index sensor. The MIM-SPR structure operating near infrared region consists of lateral periodicity of subwavelength gold patterns placed on a stack of thin silica spacer and silver film (acting as a reflector) on a silicon substrate. The reflection spectra and the electric field distributions of MIM-SPR structures can be tuned by modifying the geometrical properties and have been numerically investigated by using Lumerical’s finite-difference time-domain (FDTD) solutions. The square lattice configuration of 1200 nm to 1400 nm pitch of gold micro-disks of thickness from 80 nm to 120 nm have been conducted. The size of these considered gold patterns, i.e., the diameter of the micro-disks is in the range of 900 nm to 1000 nm. The proposed MIM-SPR structure possessing sensitivity of 370 nm per refractive index unit (RIU), can be applicable for a wide variety of plasmonic sensing, in particular for refractometric biosensors.
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