等离子体增强化学气相沉积二氧化硅升空工艺的发展

{"title":"等离子体增强化学气相沉积二氧化硅升空工艺的发展","authors":"Yatish Prasad Yatish Prasad, Chiranjeevi Lakavath Chiranjeevi Lakavath, H. M. R. H. M. Raghvendra, Selvaraj Selvaraj, B. B. B. Bhattacharyya, P. S. K. P. Sathish Kumar","doi":"10.13074/jent.2020.06.202406","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":36296,"journal":{"name":"Journal of Water and Environmental Nanotechnology","volume":"3 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Development of Lift-off Process using Plasma Enhanced Chemical Vapour Deposition Silicon dioxide\",\"authors\":\"Yatish Prasad Yatish Prasad, Chiranjeevi Lakavath Chiranjeevi Lakavath, H. M. R. H. M. Raghvendra, Selvaraj Selvaraj, B. B. B. Bhattacharyya, P. S. K. P. Sathish Kumar\",\"doi\":\"10.13074/jent.2020.06.202406\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":36296,\"journal\":{\"name\":\"Journal of Water and Environmental Nanotechnology\",\"volume\":\"3 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Water and Environmental Nanotechnology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.13074/jent.2020.06.202406\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"Materials Science\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Water and Environmental Nanotechnology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.13074/jent.2020.06.202406","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"Materials Science","Score":null,"Total":0}