钛掺杂对溶胶-凝胶沉积ZnO薄膜特性的影响

M. Yilmaz, G. Turgu
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引用次数: 12

摘要

采用溶胶-凝胶自旋镀膜的方法制备了未掺杂和掺Ti的ZnO薄膜,并研究了掺杂比对ZnO薄膜结构、形貌和光学特性的影响。薄膜具有(002)优先方向的多晶ZnO纤锌矿晶体结构,薄膜结晶度随Ti掺杂量的增加而降低。SEM研究表明,Ti掺杂后,未掺杂薄膜的纳米颗粒结构转变为纳米网状结构。未掺杂样品的透光率和光带隙随着1 at先增大。随着Ti含量的增加,它们逐渐降低。因此,目前的工作表明,ZnO的特性可以通过Ti掺杂来定制,并且ZnO:Ti薄膜在许多技术应用中具有潜在的重要性。研究方向:ZnO,溶胶-凝胶制备,Ti掺杂,薄膜
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Titanium doping effect on the characteristic properties of sol-gel deposited ZnO thin films
Undoped and Ti doped ZnO thin films were made by sol-gel spin coating, and the investigation of structural, morphological and optical features was applied as a function of the doping ratio. The films had a polycrystalline ZnO wurtzite crystal structure with (002) preferential direction and film crystallinity decreased with Ti doping content. The SEM studies indicated that the nanoparticle structure of undoped films changed to nano-network like structure with Ti doping. The transmittance and optical band gap of undoped sample firstly increased with 1 at.% Ti doping and then they decreased with higher Ti level. Consequently, the present work suggests that the characteristic properties of ZnO can be tailored with Ti doping and ZnO:Ti films have a potential importance for usage in many technological applications. K e y w o r d s: ZnO, sol-gel preparation, Ti doping, thin films
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