RS9000是一款新型MEMS加速度计系列,适用于军工/航空航天和安全关键应用

J. Stauffer, Olivier Dietrich, B. Dutoit
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引用次数: 14

摘要

中等精度的导航和控制系统需要陀螺仪和加速度计来预测自由空间中运动物体的位置。加速度计用于执行初始调平和纠正陀螺漂移在移动。通常,加速度计的范围为±10g,总体偏置稳定性优于2mg,比例因子复合重复性优于1000ppm,这是AHRS应用所需要的。目前市场上的解决方案主要是基于振动石英结构或传统的精密机械。这些解决方案存在高成本和脆弱性的问题。MEMS本质上是一种坚固耐用的技术,具有巨大的潜力,可以在恶劣环境和安全关键应用中提出新颖的解决方案,并由于其尺寸,坚固性和潜在的成本效益而实现新的解决方案。我们报告了一个名为IRIS™的新技术平台和一个基于该平台的新加速度计产品,称为RS9000系列。RS9000与开环电子电路接口,由专为高偏置稳定性而设计的新型MEMS元件组成。RS9010是一款±10g加速度计,运行中偏置稳定性优于120µg,长期复合偏置重复性优于1.5mg,比例系数重复性为400ppm,振动整流优于65µg/g2。据我们所知,这是在开环中工作的MEMS传感器报告的最高精度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
RS9000, a novel MEMS accelerometer family for Mil/Aerospace and safety critical applications
Mid accuracy navigation and control systems require gyros and accelerometer to predict the position of a moving object in free space. Accelerometers are used to perform initial levelling and correct the gyro drift on the move. Typically, accelerometer with a range of ±10g with overall bias stability better than 2 mg and scale factor composite repeatability of better than 1000 ppm is required for the AHRS application. Current solutions in the market are mainly based on either vibrating quartz structures or traditional precision mechanics. These solutions suffer from high cost and fragility. MEMS is an inherently rugged technology and has great potential to bring forth novel solutions on the harsh environment and safety critical applications and enable new solutions due to its size, ruggedness and potential cost benefits. We report a new technological platform termed IRIS™ and a new accelerometer product based on that is called RS9000 family. RS9000 is interfaced with an open-loop electronic circuit and is comprised of a novel MEMS element designed specifically for high bias stability. RS9010 is a ±10g accelerometer with in run bias stability of better than 120µg, long term composite bias repeatability of better than 1.5mg, scale factor repeatability of 400ppm and vibration rectification of better than 65µg/g2. To our knowledge, this is the highest accuracy reported for a MEMS sensor operating in open-loop.
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