高速多目标片上测量系统的研制

2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) Pub Date : 2019-01-01 DOI:10.1109/EICONRUS.2019.8657298

A. Rumyantsev, T. Krupkina, V. Losev

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引用次数: 2

摘要

本文主要研究了高速多目标测量片上系统的研制。测量系统包括集成模块和专用软件。在LabVIEW环境下开发了测量系统的集成模块与数据分析工具的交互程序。实现了两种用户接口:与数字分析仪-发生器NI-PXI-6548通信的用户接口和通用异步收发接口。本研究的主要目的是创造一种测量系统，使晶圆上的测量过程更便宜，更高效。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Development of a High-Speed Multi-Target Measurement System-on-Chip

The article is devoted to the creation of the high-speed multi-target measurement system-on-chip. The measurement system includes integral blocks and special soft. The program for interaction with integral blocks of the measurement system and the data analysis tools has been developed in LabVIEW environment. Two variants of users interface have been realized: for communication to the digital analyzer-generator NI-PXI-6548 and the universal asynchronous receiver-transmitter interface. The main purpose of the research is to create a measurement system, which makes the process of the measurement on the wafer cheaper and more productive.

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来源期刊

2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus)

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