溶胶-凝胶制备的厚压电超声换能器在工业材料加工中的潜在应用

1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118) Pub Date : 1997-10-05 DOI:10.1109/ULTSYM.1997.661751

L. Zou, M. Sayer, C. Jen

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引用次数: 16

摘要

提出了一种工作频率低于10mhz的厚膜宽带压电超声换能器。在PZT和LiNbO/sub - 3/溶胶-凝胶溶液中分别分散PZT和LiNbO/sub - 3/颗粒形成的陶瓷复合材料厚PZT和LiNbO/sub - 3/薄膜。薄膜直接沉积在不锈钢基板上。用直径为1 cm、厚度为40-50 /spl mu/m的压电PZT和LiNbO/ sub3 /薄膜实验获得了良好的宽带信号。

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Sol-gel fabricated thick piezoelectric ultrasonic transducers for potential applications in industrial material processes

Sol-gel fabricated thick film broadband piezoelectric ultrasonic transducers (UTs) operating at a frequency below 10 MHz are presented. The UTs are formed using thick PZT and LiNbO/sub 3/ films which are ceramic-ceramic composites formed by dispersing PZT and LiNbO/sub 3/ particles in a PZT and LiNbO/sub 3/ sol-gel solution, respectively. Films are directly deposited on stainless steel substrates. Excellent broadband signals have been experimentally obtained with piezoelectric PZT and LiNbO/sub 3/ films with 1 cm diameter and a thickness between 40-50 /spl mu/m.

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1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)

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