Minnath Kolpe, V. Giramkar, Varsha Chaware, S. Joseph, G. Phatak
{"title":"内部开发的电阻膏体在LTCC中作为传感器应用的埋式微加热器的制造和表征","authors":"Minnath Kolpe, V. Giramkar, Varsha Chaware, S. Joseph, G. Phatak","doi":"10.1109/ISPTS.2015.7220118","DOIUrl":null,"url":null,"abstract":"This paper presents structural, morphological and electrical characterization of the in-house developed ruthenium oxide based thick film resistor pastes for buried heater applications in LTCC. The basic electrical characterization of heater shows that the designed test heater achieved temperature up to 238°C. The required power to raise the temperature up to 238°C was 1.9W. It is found that the in-house resistor paste has better shrinkage compatibility with commercial LTCC Tape as compared with the manufacturer's own compatible resistor paste.","PeriodicalId":6520,"journal":{"name":"2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS)","volume":"27 1","pages":"230-234"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabrication and characterization of in-house developed resistor paste as buried micro heaters in LTCC for sensor applications\",\"authors\":\"Minnath Kolpe, V. Giramkar, Varsha Chaware, S. Joseph, G. Phatak\",\"doi\":\"10.1109/ISPTS.2015.7220118\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents structural, morphological and electrical characterization of the in-house developed ruthenium oxide based thick film resistor pastes for buried heater applications in LTCC. The basic electrical characterization of heater shows that the designed test heater achieved temperature up to 238°C. The required power to raise the temperature up to 238°C was 1.9W. It is found that the in-house resistor paste has better shrinkage compatibility with commercial LTCC Tape as compared with the manufacturer's own compatible resistor paste.\",\"PeriodicalId\":6520,\"journal\":{\"name\":\"2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS)\",\"volume\":\"27 1\",\"pages\":\"230-234\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-03-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISPTS.2015.7220118\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISPTS.2015.7220118","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication and characterization of in-house developed resistor paste as buried micro heaters in LTCC for sensor applications
This paper presents structural, morphological and electrical characterization of the in-house developed ruthenium oxide based thick film resistor pastes for buried heater applications in LTCC. The basic electrical characterization of heater shows that the designed test heater achieved temperature up to 238°C. The required power to raise the temperature up to 238°C was 1.9W. It is found that the in-house resistor paste has better shrinkage compatibility with commercial LTCC Tape as compared with the manufacturer's own compatible resistor paste.