水滴辅助激光直接纳米结构

The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2014-04-13 DOI:10.1109/NEMS.2014.6908772

Y. J. Chang, C. H. Chang, C. Ho, J. Hsu, C. Kuo

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引用次数: 0

摘要

利用激光直写技术制备纳米结构，显示出巨大的工业应用潜力。本文提出了一种将水滴应用于该技术的新方法。通过疏水层和控制衬底温度，在衬底上形成具有高接触角的随机分布的水滴层。这些液滴可以用作透镜，以增强液滴底部的激光强度。结果表明，通过控制激光能量密度，可以在衬底上制备纳米级孔。我们在衬底温度为12°C，功率密度为1.2×108 mW/cm2的条件下成功制备了直径为600nm的孔。

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Laser direct nano-structuring assisted by water droplets

Nano-structuring using laser direct writing technology has shown a great potential for industrial applications. A novel application of water droplets to this technology is proposed in this paper. With a hydrophobic layer and a controlled substrate temperature, a layer of randomly distributed water droplets with a high contact angle is formed on the substrate. These liquid droplets can be used as lenses to enhance the laser intensity at the bottom of the droplets. As a result, nanoscale holes can be fabricated on the substrate by controlling the laser energy density. We successfully fabricate holes with a diameter of 600nm at a substrate temperature of 12°C and a power density of 1.2×108 mW/cm2 in our experiments.

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The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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