溶胶-凝胶自旋镀膜技术制备透明导电ZnO薄膜

. S.Rajesh, . K.Saravanakumar, . T.Jayakumar, . V.Kathiravan, . S.Praburaj, . M.Aasha
{"title":"溶胶-凝胶自旋镀膜技术制备透明导电ZnO薄膜","authors":". S.Rajesh, . K.Saravanakumar, . T.Jayakumar, . V.Kathiravan, . S.Praburaj, . M.Aasha","doi":"10.29294/IJASE.5.3.2019.1072-1076","DOIUrl":null,"url":null,"abstract":"International Journal of Advanced Science and Engineering www.mahendrapublications.com ABSTRACT: To date, thin film deposition with low cost technique and desired process parameters has been intensively studied. The cost effective sol-gel spin coating has been widely used for the deposition of different types of elements in thin film form. ZnO thin films can also deposit with the application of this technique. The prepared solution led to deposit high crystalline ZnO thin films without annealing at elevated temperature. The crystal structure of deposited films was characterized by X-ray diffraction technique. Narrowed and high intensity diffraction peak at 34.4° clearly indicated that the films exhibit hexagonal wrutzite structure of ZnO. The optical properties of these films were typically studied using UVvis NIR double beam spectrophometer, the optical transmittance in the visible region was more than 90% and showed sharp absorption edge. SEM images showed earth warm like wrinkle surface. The four probe method revealed electrical resistivity of 1. 4 Ω cm.","PeriodicalId":23617,"journal":{"name":"Volume 5 No.3; 2019","volume":"6 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2019-03-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Production of Transparent Conducting ZnO Thin Films with Preheated Temperature by Sol-Gel Spin Coating Technique\",\"authors\":\". S.Rajesh, . K.Saravanakumar, . T.Jayakumar, . V.Kathiravan, . S.Praburaj, . M.Aasha\",\"doi\":\"10.29294/IJASE.5.3.2019.1072-1076\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"International Journal of Advanced Science and Engineering www.mahendrapublications.com ABSTRACT: To date, thin film deposition with low cost technique and desired process parameters has been intensively studied. The cost effective sol-gel spin coating has been widely used for the deposition of different types of elements in thin film form. ZnO thin films can also deposit with the application of this technique. The prepared solution led to deposit high crystalline ZnO thin films without annealing at elevated temperature. The crystal structure of deposited films was characterized by X-ray diffraction technique. Narrowed and high intensity diffraction peak at 34.4° clearly indicated that the films exhibit hexagonal wrutzite structure of ZnO. The optical properties of these films were typically studied using UVvis NIR double beam spectrophometer, the optical transmittance in the visible region was more than 90% and showed sharp absorption edge. SEM images showed earth warm like wrinkle surface. The four probe method revealed electrical resistivity of 1. 4 Ω cm.\",\"PeriodicalId\":23617,\"journal\":{\"name\":\"Volume 5 No.3; 2019\",\"volume\":\"6 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-03-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Volume 5 No.3; 2019\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.29294/IJASE.5.3.2019.1072-1076\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Volume 5 No.3; 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.29294/IJASE.5.3.2019.1072-1076","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

摘要:迄今为止,低成本的薄膜沉积技术和理想的工艺参数得到了广泛的研究。溶胶-凝胶自旋涂层已广泛应用于不同类型元素的薄膜沉积。应用该技术还可以沉积ZnO薄膜。制备的溶液在高温下无需退火即可沉积出高结晶ZnO薄膜。用x射线衍射技术对沉积膜的晶体结构进行了表征。在34.4°处,衍射峰变窄且强度高,表明薄膜具有ZnO的六方菱形结构。采用紫外-近红外双光束分光光度计对薄膜的光学性能进行了典型研究,其可见光区的透光率大于90%,并表现出明显的吸收边缘。扫描电镜图像显示地球表面温热似皱。四探头法测得电阻率为1。4 Ω cm。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Production of Transparent Conducting ZnO Thin Films with Preheated Temperature by Sol-Gel Spin Coating Technique
International Journal of Advanced Science and Engineering www.mahendrapublications.com ABSTRACT: To date, thin film deposition with low cost technique and desired process parameters has been intensively studied. The cost effective sol-gel spin coating has been widely used for the deposition of different types of elements in thin film form. ZnO thin films can also deposit with the application of this technique. The prepared solution led to deposit high crystalline ZnO thin films without annealing at elevated temperature. The crystal structure of deposited films was characterized by X-ray diffraction technique. Narrowed and high intensity diffraction peak at 34.4° clearly indicated that the films exhibit hexagonal wrutzite structure of ZnO. The optical properties of these films were typically studied using UVvis NIR double beam spectrophometer, the optical transmittance in the visible region was more than 90% and showed sharp absorption edge. SEM images showed earth warm like wrinkle surface. The four probe method revealed electrical resistivity of 1. 4 Ω cm.
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