催化剂成分和Au催化剂几何影响在催化金属腐蚀下形成有序的纳米柱阵列

{"title":"催化剂成分和Au催化剂几何影响在催化金属腐蚀下形成有序的纳米柱阵列","authors":"","doi":"10.34077/silicon2022-125","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":32503,"journal":{"name":"Sel''skokhoziaistvennye mashiny i tekhnologii","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2022-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Влияние состава травителя и геометрии Au катализатора на формирование упорядоченных массивов наностолбиков при метал-стимулированном каталитическом травлении кремния\",\"authors\":\"\",\"doi\":\"10.34077/silicon2022-125\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":32503,\"journal\":{\"name\":\"Sel''skokhoziaistvennye mashiny i tekhnologii\",\"volume\":\"1 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-09-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Sel''skokhoziaistvennye mashiny i tekhnologii\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.34077/silicon2022-125\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sel''skokhoziaistvennye mashiny i tekhnologii","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.34077/silicon2022-125","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}