带数字间电极的薄膜体声波压电滤波器的横变厚度-拉伸模式

IF 1.3 4区物理与天体物理 Q4 PHYSICS, CONDENSED MATTER

Ferroelectrics Letters Section Pub Date : 2019-06-28 DOI:10.1080/07315171.2019.1647711

Jing Liu, Jianke Du, Ji Wang, Jia-shi Yang

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引用次数: 2

摘要

利用Tiersten和Stevens的标量微分方程，从理论上研究了薄膜体声波滤波器的自由振动。该滤波器由硅衬底上的AlN或ZnO压电晶体薄膜制成，具有数字间接地和驱动电极。它们以厚度-拉伸模式运行。得到沿电极面内方向和垂直于电极面内方向的横向变化模式，包括器件工作模式和需要通过设计预测和避免的不希望的模式。

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Transversely varying thickness-extensional modes in thin film bulk acoustic wave piezoelectric filters with interdigital electrodes

Abstract We study free vibrations of thin-film bulk acoustic wave filters theoretically using the scalar differential equations by Tiersten and Stevens. The filters are made from piezoelectric crystal films of AlN or ZnO on Si substrates with interdigital ground and driving electrodes. They operate with thickness-extensional modes. Transversely varying modes with variations in both of the in-plane directions along and perpendicular to the electrodes are obtained, including both the device operating modes and unwanted modes which need to be predicted and avoided through design.

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来源期刊

Ferroelectrics Letters Section 物理-物理：凝聚态物理

CiteScore

1.10

自引率

0.00%

发文量

审稿时长

4.8 months

期刊介绍： Ferroelectrics Letters is a separately published section of the international journal Ferroelectrics. Both sections publish theoretical, experimental and applied papers on ferroelectrics and related materials, including ferroelastics, ferroelectric ferromagnetics, electrooptics, piezoelectrics, pyroelectrics, nonlinear dielectrics, polymers and liquid crystals. Ferroelectrics Letters permits the rapid publication of important, quality, short original papers on the theory, synthesis, properties and applications of ferroelectrics and related materials.