高填充系数非制冷红外探测器四分之一波吸收结构的设计、分析与实现

2018 43rd International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) Pub Date : 2018-09-01 DOI:10.1109/IRMMW-THZ.2018.8510442

Ramazan Cetin, Ozan Erturk, T. Akin

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引用次数: 2

摘要

本研究提出了一种伞形结构的设计、分析、优化和制造，作为长波红外(LWIR)范围内有效的四分之一波吸收器，用于非冷却红外探测器。研究了镍铬(NiCr)层和不同像素间距对伞状结构红外吸收性能的影响。在LWIRrange范围内，优化后的样品平均吸收率为96%。

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Design, Analysis and Implementation of Quarter-wave Absorber Structure for Uncooled Infrared Detectors with High Fill Factor

This study presents design, analysis, optimization, and fabrication of umbrella structures as an efficient quarter wave absorber within the Long Wave Infrared (LWIR) range for uncooled IR detectors. Both the effect of the ni-chrome (NiCr) layer and effect of varying pixel pitch sizes on the IR absorption performance of the umbrella structures are examined. An average of 96% absorption is measured for the optimized case within the LWIRrange.

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来源期刊

2018 43rd International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)

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