电感耦合等离子体在蒙皮层中形成的有源电子电流驱动下的离子声不稳定性

V. Mikhailenko, V. Mikhailenko, H. J. Lee
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引用次数: 4

摘要

针对射频波中电子颤振速度等于或大于电子热速度的情况,建立了电感耦合等离子体的稳定性理论。该理论预测了ICP不稳定性的存在,这种不稳定性是由加速电子在质动势作用下使相对离子运动的皮层中形成的电流驱动的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The ion-acoustic instability of the inductively coupled plasma driven by the ponderomotive electron current formed in the skin layer
The stability theory of the inductively coupled plasma (ICP) is developed for the case when the electron quiver velocity in RF wave is of the order of or is larger than the electron thermal velocity. The theory predicts the existence the instabilities of the ICP which are driven by the current formed in the skin layer by the accelerated electrons, which move relative ions under the action of the ponderomotive force.
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