基于MEMS谐振器的脉冲驱动读出系统用于液体传感

The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2014-04-13 DOI:10.1109/NEMS.2014.6908794

Meng Tang, A. Cagliani, Z. Davis, Lin He

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引用次数: 0

摘要

采用MEMS(微机电系统)体盘谐振器在其动态模式下进行质量传感。经典的读出电路包括复杂的反馈回路和馈通补偿。我们提出了一个简单直接的非环路脉冲模式驱动和电容读出方案。为了验证其在液体生化传感环境中的可行性，进行了湿度传感应用的实验测量。当湿度变化0~80%时，测量到的谐振频率在67.7MHz范围内变化60kHz。

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Pulse mode actuation-readout system based on MEMS resonator for liquid sensing

A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated feedback loop and feedthrough compensation. We propose a simple straightforward non-loop pulse mode actuation and capacitive readout scheme. In order to verify its feasibility in liquid bio-chemical sensing environment, an experimental measurement is conducted with humidity sensing application. The measured resonant frequency changes 60kHz of 67.7MHz with a humidity change of 0~80%.

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The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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