单晶硅轮廓模谐振器中TCf的晶体学和特征模依赖性

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474354

H. Zhu, G. Shan, Cheng Tu, Joshua E-Y Lee

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引用次数: 5

摘要

本文报道了晶体取向对单晶硅方形微机械谐振器在两种不同的轮廓模式下振动的频率温度系数(TCf)的影响:lam模式和方形伸展模式。对于lam模式，在几个与方向对齐的器件中发现了相同的TCf，而在与方向对齐的器件中观察到更大的TCf变化。对于SE模式，在不同掺杂水平下，两个方向的器件表现出相似的TCf值。这些观察得到了Keyes理论的支持，实验和模拟之间的密切一致。

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Crystallographic and eigenmode dependence of TCf for single crystal silicon contour mode resonators

This paper reports the effects of crystal orientations on the temperature coefficient of frequency (TCf) of single crystal silicon square-plate micromechanical resonators vibrating in two distinct contour modes: Lamé mode and square extensional (SE). For the Lamé mode, the same TCf was found over several devices aligned to the <;110> direction, while much greater variation in the TCf was observed among the devices aligned against the <;100> direction. For the SE mode, the devices in both <;100> and <;110> orientations exhibit similar TCf values for varying doping levels. These observations are supported by Keyes' theory and close agreement between experiments and simulations is shown.

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来源期刊

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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