{"title":"强表面放电抽运真空紫外线灯的研制","authors":"H. Hatanaka, R. Sze","doi":"10.1109/PPC.1995.599829","DOIUrl":null,"url":null,"abstract":"A large area (15 cm /spl times/15 cm) uniform vacuum ultraviolet light source employing a surface discharge pumping scheme has been developed for semiconductor processing applications. A low inductance pulsed power circuit for initiating the large area uniform surface discharge was constructed. The total stored energy in the capacitors (4.2 /spl mu/F) is 1.9 kJ when charged to 30 kV. A current pulse of 1.5 /spl mu/s with a peak of 210 kA is deposited to the discharge load from the three capacitor modules. The uniformity of the light over the large area surface discharge is 5% on the surface from visible light measurement when alumina is used as a discharge plate material.","PeriodicalId":11163,"journal":{"name":"Digest of Technical Papers. Tenth IEEE International Pulsed Power Conference","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1995-07-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Development of an intense surface discharge pumped vacuum ultraviolet lamp\",\"authors\":\"H. Hatanaka, R. Sze\",\"doi\":\"10.1109/PPC.1995.599829\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A large area (15 cm /spl times/15 cm) uniform vacuum ultraviolet light source employing a surface discharge pumping scheme has been developed for semiconductor processing applications. A low inductance pulsed power circuit for initiating the large area uniform surface discharge was constructed. The total stored energy in the capacitors (4.2 /spl mu/F) is 1.9 kJ when charged to 30 kV. A current pulse of 1.5 /spl mu/s with a peak of 210 kA is deposited to the discharge load from the three capacitor modules. The uniformity of the light over the large area surface discharge is 5% on the surface from visible light measurement when alumina is used as a discharge plate material.\",\"PeriodicalId\":11163,\"journal\":{\"name\":\"Digest of Technical Papers. Tenth IEEE International Pulsed Power Conference\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1995-07-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Digest of Technical Papers. Tenth IEEE International Pulsed Power Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/PPC.1995.599829\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of Technical Papers. Tenth IEEE International Pulsed Power Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PPC.1995.599829","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Development of an intense surface discharge pumped vacuum ultraviolet lamp
A large area (15 cm /spl times/15 cm) uniform vacuum ultraviolet light source employing a surface discharge pumping scheme has been developed for semiconductor processing applications. A low inductance pulsed power circuit for initiating the large area uniform surface discharge was constructed. The total stored energy in the capacitors (4.2 /spl mu/F) is 1.9 kJ when charged to 30 kV. A current pulse of 1.5 /spl mu/s with a peak of 210 kA is deposited to the discharge load from the three capacitor modules. The uniformity of the light over the large area surface discharge is 5% on the surface from visible light measurement when alumina is used as a discharge plate material.
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