E. O. Popov, Sergey Filippov, A. G. Kolosko, A. Knápek
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Comparison of the effective parameters of single-tip tungsten emitter using Fowler–Nordheim and Murphy–Good plots
A study of single-tip tungsten emitters with the construction of current–voltage dependences in quadratic Fowler–Nordheim coordinates and modified coordinates (Murphy–Good plot that depend on the value of the work function) in real-time has been carried out. The statistical data on the value of the emission area and the field enhancement factor were accumulated. The statistical data on the voltage power in the pre-exponential factor were obtained by plotting the dependence of the notional emission area on the dimensionless field at the tip apex in the coordinates ln( Im/ Jk) versus ln( f). An empirical formula is proposed that uses a correction for the power of voltage, taking into account the shape of the tip.
期刊介绍:
Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.