基于smd激活的加压微阀，可在低成本和自主MEMS中驱动流体

2013 Spanish Conference on Electron Devices Pub Date : 2013-03-21 DOI:10.1109/CDE.2013.6481364

G. Flores, F. Perdigones, J. Quero

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引用次数: 1

摘要

本文报道了一种在基于pcb的芯片实验室(Lab on a Chip, LOC) MEMS器件中实现流体脉冲的廉价而简单的方法。这种方法包括使用加压的SU-8室，用膜作为覆盖物。在体积不变的情况下，由于温度升高，腔内压力增加，膜破裂。温度的升高是通过向表面贴装器件(SMD)电阻提供电压来实现的。该方法用于制造自主和廉价的LOC器件。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Pressurized microvalve with SMD-based activation to drive fluid in low-cost and autonomous MEMS

This paper reports an inexpensive and simple method to impulse fluid in PCB-based Lab on a Chip (LOC) MEMS devices. This method consists on using pressurized SU-8 chambers, with membranes as cover. The membrane is burst thank to the increase of pressure in the chamber due to the increase of temperature, at constant volume. The increase of temperature is achieved supplying voltage to a Surface-Mounted-Device (SMD) resistor. This method is intended for fabricating autonomous and inexpensive LOC devices.

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2013 Spanish Conference on Electron Devices

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