下一代光刻技术

{"title":"下一代光刻技术","authors":"Yu Guo-bing","doi":"10.1016/s0961-1290(05)71100-5","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":11802,"journal":{"name":"电子工业专用设备","volume":"18 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2005-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The Next Generation Lithography\",\"authors\":\"Yu Guo-bing\",\"doi\":\"10.1016/s0961-1290(05)71100-5\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":11802,\"journal\":{\"name\":\"电子工业专用设备\",\"volume\":\"18 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"电子工业专用设备\",\"FirstCategoryId\":\"1093\",\"ListUrlMain\":\"https://doi.org/10.1016/s0961-1290(05)71100-5\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"电子工业专用设备","FirstCategoryId":"1093","ListUrlMain":"https://doi.org/10.1016/s0961-1290(05)71100-5","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}