{"title":"表面微机械角速率传感器","authors":"Jack D. Johnson, S. Zarabadi, D. Sparks","doi":"10.4271/950538","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":35781,"journal":{"name":"汽车工程","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1995-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"18","resultStr":"{\"title\":\"Surface micromachined angular rate sensor\",\"authors\":\"Jack D. Johnson, S. Zarabadi, D. Sparks\",\"doi\":\"10.4271/950538\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":35781,\"journal\":{\"name\":\"汽车工程\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1995-02-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"18\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"汽车工程\",\"FirstCategoryId\":\"1087\",\"ListUrlMain\":\"https://doi.org/10.4271/950538\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"Engineering\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"汽车工程","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.4271/950538","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"Engineering","Score":null,"Total":0}