聚合物光学MEMS集成在VCSELs上用于生物传感

2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI:10.1109/OMN.2013.6659052

V. Bardinal, T. Camps, B. Reig, J. Doucet, S. Abada, E. Daran

{"title":"聚合物光学MEMS集成在VCSELs上用于生物传感","authors":"V. Bardinal, T. Camps, B. Reig, J. Doucet, S. Abada, E. Daran","doi":"10.1109/OMN.2013.6659052","DOIUrl":null,"url":null,"abstract":"We present our recent advances on design and fabrication of polymer optical MEMS that can be directly integrated on VCSELs arrays for dynamic beam focusing. These studies open new insights for the fabrication of compact optical sensors that require a real-time scan of laser beam position.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"3 1","pages":"47-48"},"PeriodicalIF":0.0000,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Polymer optical MEMS integrated on VCSELs for biosensing\",\"authors\":\"V. Bardinal, T. Camps, B. Reig, J. Doucet, S. Abada, E. Daran\",\"doi\":\"10.1109/OMN.2013.6659052\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present our recent advances on design and fabrication of polymer optical MEMS that can be directly integrated on VCSELs arrays for dynamic beam focusing. These studies open new insights for the fabrication of compact optical sensors that require a real-time scan of laser beam position.\",\"PeriodicalId\":6334,\"journal\":{\"name\":\"2013 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"volume\":\"3 1\",\"pages\":\"47-48\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-11-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN.2013.6659052\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2013.6659052","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

我们介绍了可以直接集成在VCSELs阵列上用于动态光束聚焦的聚合物光学MEMS的设计和制造的最新进展。这些研究为需要实时扫描激光束位置的紧凑型光学传感器的制造提供了新的见解。

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Polymer optical MEMS integrated on VCSELs for biosensing

We present our recent advances on design and fabrication of polymer optical MEMS that can be directly integrated on VCSELs arrays for dynamic beam focusing. These studies open new insights for the fabrication of compact optical sensors that require a real-time scan of laser beam position.

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2013 International Conference on Optical MEMS and Nanophotonics (OMN)

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