基于蚊子法的聚合物光波导精确芯对准高效耦合

Y. Morimoto, Kumi Date, T. Ishigure
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引用次数: 0

摘要

我们证明了用蚊子法制作三维布线的聚合物光波导中形成芯的垂直位置精度的重要性。从理论上证实了芯的垂直位置偏离设计位置是由几个加工参数、针的尺寸和针的扫描速度引起的。以三维布线为例,重点研究了45度反射镜的光路转换,并通过实验研究了核心垂直位置对45度反射镜与其他组件耦合效率的影响。通过在包层的适当高度上形成芯,由于镜面结构,梯度折射率芯光波导的损耗增量低至0.2 dB,实现了45度镜面的高效耦合。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Accurate Core Alignment for Polymer Optical Waveguide in the Mosquito Method for High-Efficient Coupling
We demonstrate the importance of vertical position accuracy of formed core in the polymer optical waveguides fabricated using the Mosquito method for 3-dimensional wiring. We theoretically confirm the core vertical position deviation from the designed position is caused by the several fabrication parameters, the needle size and the needle-scanning speed. As an example of 3-dimensional wiring, we focus on the optical path conversion by 45-degree mirrors, and experimentally investigate the influence of the core vertical position on the coupling efficiency to other components via a 45-degree mirror. By forming the cores on appropriate height in the cladding, graded-index core optical waveguides exhibit a slight loss increment as low as 0.2 dB due to mirror structure, realizing the high efficient coupling via a 45-degree mirror.
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