The dependence of electrical properties of Molybdenum Trioxide Thin Films on substrate temperature

Thin films of molybdenum trioxide (MoO3) were deposited by thermal evaporation technique on to a glass substrate at different temperatures. The variation of electrical property with temperature as well as with UV irradiation was studied. The substrate temperature seems to affect the electrical property of the deposited films. The electrical resistivity decreases as the substrate temperature decrease. The effect of UV irradiation on samples were systematically investigated with different substrate temperature. All samples were exposed to UV irradiation for one hour. By exposing samples to UV irradiation, electrical resistivity was found to decrease as a function of time. A correlation is established between, UV irradiation, and the substrate temperature of the MoO3 films. This dependence of the substrate temperature is important in the point of view of applications, where the we can control the resistivity of the MoO3 film depending on the application needed.