偏振无关的双端口分束光栅

Jijun Feng, Changhe Zhou, Jiangjun Zheng, Hongchao Cao, P. Lv
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引用次数: 3

摘要

设计了一种用于偏振无关双端口分束器的亚波长光栅。采用简化模态法进行设计。可以采用全息记录技术和电感耦合等离子体刻蚀技术制作光栅。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Polarization independent two-port beam splitter grating
We designed a subwavelength grating for polarization-independent two-port beam splitter. The design is based on the simplified modal method. Holographic recording technology and inductively coupled plasma etching can be used to manufacture the grating.
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