溶胶-凝胶法制备Pb(Sc/sub 0.5/Ta/sub 0.5/)O/sub 3/粉末和薄层的低温结晶和有序

Donhang Liu, D. Payne
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引用次数: 1

摘要

采用溶胶-凝胶法制备了钽酸铅钪(PST),并在还原温度(600 ~ 700℃/spl)下测定了PST在钙钛矿相中的结晶情况。b位阳离子排序的程度也被确定为冷却条件的函数。报道了电容密度大于200 fF//spl mu/m/sup //的硅基电容器集成的结果。优选(111)取向,具有(1/2 /2 /2)b位阳离子偏序。没有证据表明a位的Pb空位排序。报道了x射线衍射和选择区域电子衍射的研究结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Lower temperature crystallization and ordering in sol-gel derived Pb(Sc/sub 0.5/Ta/sub 0.5/)O/sub 3/ powders and thin layers
Lead scandium tantalate (PST) was prepared by sol-gel processing, and the crystallization into the perovskite phase was determined at reduced temperatures (600-700/spl deg/C). The extent of B-site cation ordering was also determined as a function of cooling conditions. Results are reported for the integration of capacitors on silicon with a capacitance density greater than 200 fF//spl mu/m/sup 2/. A preferred (111) orientation was obtained, with ( 1/2 1/2 1/2 ) B-site cation partial ordering. No evidence was obtained for A-site Pb vacancy ordering. Results are reported for X-ray diffraction and selected-area electron diffraction investigations.
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