{"title":"溶胶-凝胶法制备Pb(Sc/sub 0.5/Ta/sub 0.5/)O/sub 3/粉末和薄层的低温结晶和有序","authors":"Donhang Liu, D. Payne","doi":"10.1109/ISAF.1994.522395","DOIUrl":null,"url":null,"abstract":"Lead scandium tantalate (PST) was prepared by sol-gel processing, and the crystallization into the perovskite phase was determined at reduced temperatures (600-700/spl deg/C). The extent of B-site cation ordering was also determined as a function of cooling conditions. Results are reported for the integration of capacitors on silicon with a capacitance density greater than 200 fF//spl mu/m/sup 2/. A preferred (111) orientation was obtained, with ( 1/2 1/2 1/2 ) B-site cation partial ordering. No evidence was obtained for A-site Pb vacancy ordering. Results are reported for X-ray diffraction and selected-area electron diffraction investigations.","PeriodicalId":20488,"journal":{"name":"Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics","volume":"65 1","pages":"435-438"},"PeriodicalIF":0.0000,"publicationDate":"1994-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Lower temperature crystallization and ordering in sol-gel derived Pb(Sc/sub 0.5/Ta/sub 0.5/)O/sub 3/ powders and thin layers\",\"authors\":\"Donhang Liu, D. Payne\",\"doi\":\"10.1109/ISAF.1994.522395\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Lead scandium tantalate (PST) was prepared by sol-gel processing, and the crystallization into the perovskite phase was determined at reduced temperatures (600-700/spl deg/C). The extent of B-site cation ordering was also determined as a function of cooling conditions. Results are reported for the integration of capacitors on silicon with a capacitance density greater than 200 fF//spl mu/m/sup 2/. A preferred (111) orientation was obtained, with ( 1/2 1/2 1/2 ) B-site cation partial ordering. No evidence was obtained for A-site Pb vacancy ordering. Results are reported for X-ray diffraction and selected-area electron diffraction investigations.\",\"PeriodicalId\":20488,\"journal\":{\"name\":\"Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics\",\"volume\":\"65 1\",\"pages\":\"435-438\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-08-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISAF.1994.522395\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.1994.522395","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Lower temperature crystallization and ordering in sol-gel derived Pb(Sc/sub 0.5/Ta/sub 0.5/)O/sub 3/ powders and thin layers
Lead scandium tantalate (PST) was prepared by sol-gel processing, and the crystallization into the perovskite phase was determined at reduced temperatures (600-700/spl deg/C). The extent of B-site cation ordering was also determined as a function of cooling conditions. Results are reported for the integration of capacitors on silicon with a capacitance density greater than 200 fF//spl mu/m/sup 2/. A preferred (111) orientation was obtained, with ( 1/2 1/2 1/2 ) B-site cation partial ordering. No evidence was obtained for A-site Pb vacancy ordering. Results are reported for X-ray diffraction and selected-area electron diffraction investigations.