MEMS测斜仪中三种梳状驱动器的研究

2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) Pub Date : 2018-01-01 DOI:10.1109/EICONRUS.2018.8317442

K. Aung, B. M. Simonov, V. Kalugin, K. Linn

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引用次数: 1

摘要

为了提高微机电系统梳子驱动测斜仪的灵敏度，研究了梳子驱动的三种形状:普通、三角形和曲线。采用典型的折叠梁进行转子部分的位移。在ANSYS中计算结果表明，曲线型梳状传动的电容变化大于其他形状的电容变化。曲线形作动器的品质系数高于其他形状作动器。曲线形状的梳子驱动更适合于获得更高灵敏度的梳子驱动MEMS倾角仪。

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The investigation of three types of comb-drive actuator for MEMS inclinometer

To improve the sensitivity of the MEMS comb — drive inclinometer three shapes of the comb-drive: ordinary, triangular and curve were investigated. We used typical folded beam for displacement of rotor part. By calculating the results in ANSYS, the change of capacitance in curve shape comb-drive is more than in the other shapes. And the quality factor of curve shape actuator is higher than in other shape actuator. The curve shape comb-drive is more suitable for getting higher sensitivity for comb-drive MEMS inclinometer.

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2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus)

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