基于扩展栅场效应晶体管的农药微传感器检测有机磷和氨基甲酸酯

IF 1.5 2区物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Micro/Nanolithography, MEMS, and MOEMS Pub Date : 2019-01-01 DOI:10.1117/1.JMM.18.1.015002

Chia-Hsu Hsieh, Yi-Chan Yeh, Le-Quyen Ly, Guan-Jie Su, Shao-En Tsai, Yu-Hua Ye, Yu-Cheng Lin, I. Huang

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引用次数: 1

摘要

摘要采用微机电系统技术，研制了一种高性能的扩展栅场效应晶体管(EGFET)农药微传感器，用于有机磷和氨基甲酸酯(CM)的检测。为了最小化整个农药传感系统，我们还将平面Ti/Ag/AgCl/ kcl -凝胶微参比电极集成到同一硅芯片中。所提出的农药传感系统的总尺寸仅为0.92 × 0.95 × 0.1 cm3。这种基于egfet的有机磷和CMs微传感器具有极高的灵敏度(分别为194和268.1 mV/dec)、检测线性度(分别为0.993和0.974)和极低的响应时间(分别为120和300 s)。微传感器对这两种农药的检测限均为0.001 ppm。

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Extended-gate field-effect transistor-based pesticide microsensor for the detection of organophosphorus and carbamate

Abstract. Using microelectromechanical systems technology, a high-performance extended-gate field-effect transistor (EGFET)-based pesticide microsensor for organophosphorus and carbamate (CM) detection is developed. To minimize the whole pesticide-sensing system, we also integrated a planar Ti/Ag/AgCl/KCl-gel microreference electrode into the same silicon chip. The total dimensions of the proposed pesticide-sensing system are only 0.92 × 0.95 × 0.1 cm3. This EGFET-based microsensor for organophosphorus and CMs demonstrates extremely high sensitivity (194 and 268.1 mV/dec, respectively) and sensing linearity (0.993 and 0.974, respectively) and extremely low response time (120 and 300 s, respectively). The microsensor detection limit for both pesticides is 0.001 ppm.

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来源期刊

Journal of Micro/Nanolithography, MEMS, and MOEMS Multiple-

CiteScore

3.40

自引率

30.40%

发文量

审稿时长

6-12 weeks