二维复合材料的化学气相沉积生长:可控性、材料质量和生长机制

Lei Tang, Junyang Tan, Huiyun Nong, Bilu Liu, Hui‐Ming Cheng
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引用次数: 70

摘要

二维(2D)复合材料是一种很有前途的材料,可用于电子、光电子、柔性器件等领域,因为它们超薄且具有广泛的性能。在所有制备二维材料的方法中,化学气相沉积(CVD)因其制备的材料质量高、成本合理而具有广阔的应用前景。到目前为止,人们已经努力制造出具有畴尺寸大、层数可控、生长速度快、质量高等特点的二维复合材料。然而,由于多种前驱体的升华和扩散过程等复杂的生长机制,保持CVD生长的二维二元和三元材料的可控性、可重复性和高质量仍然是一个很大的挑战,阻碍了它们的广泛应用。本文以二维过渡金属二硫族化合物(TMDCs)为例,综述了目前的研究进展,并重点介绍了一些有前途的二维复合材料生长策略。讨论了影响CVD工艺的关键技术问题,包括非金属前驱体、金属前驱体、衬底工程、温度和气流。此外,还重点介绍了提高cvd生长的二维材料质量的方法和目前对其生长机制的了解。最后,提出了该领域面临的挑战和机遇。我们相信这一综述将指导未来可控CVD系统的设计,使其具有良好的可控性和高质量,为其潜在的应用奠定基础。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Chemical Vapor Deposition Growth of Two-Dimensional Compound Materials: Controllability, Material Quality, and Growth Mechanism
CONSPECTUS: Two-dimensional (2D) compound materials are promising materials for use in electronics, optoelectronics, flexible devices, etc. because they are ultrathin and cover a wide range of properties. Among all methods to prepare 2D materials, chemical vapor deposition (CVD) is promising because it produces materials with a high quality and reasonable cost. So far, much efforts have been made to produce 2D compound materials with large domain size, controllable number of layers, fast-growth rate, and high quality features, etc. However, due to the complicated growth mechanism like sublimation and diffusion processes of multiple precursors, maintaining the controllability, repeatability, and high quality of CVD grown 2D binary and ternary materials is still a big challenge, which prevents their widespread use. Here, taking 2D transition metal dichalcogenides (TMDCs) as examples, we review current progress and highlight some promising growth strategies for the growth of 2D compound materials. The key technology issues which affect the CVD process, including non-metal precursor, metal precursor, substrate engineering, temperature, and gas flow, are discussed. Also, methods in improving the quality of CVD-grown 2D materials and current understanding on their growth mechanism are highlighted. Finally, challenges and opportunities in this field are proposed. We believe this review will guide the future design of controllable CVD systems for the growth of 2D compound materials with good controllability and high quality, laying the foundations for their potential applications.
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