微温度对绝对平整度试验板的影响

V. Greco, G. Molesini
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引用次数: 11

摘要

本文报道了在测试板上进行的高灵敏度干涉测量,显示出光程差的特殊变异性图。考虑了测试板的微温度变形,考虑了观察到的图;对温度不均匀性的数量级进行了评估。指出热不稳定性是限制平整度标准子可行性和评价的有效因素。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Micro-temperature effects on absolute flatness test plates
High-sensitivity interferometric measurements on test plates are reported, showing peculiar variability maps of optical path difference. Micro-temperature deformations of the test plates are considered, accounting for the maps observed; orders of magnitude for the temperature disuniformities are evaluated. Thermal instabilities are pointed out as an effective limit to the feasibility and assessment of flatness etalons.
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