用于光学应用的低功率三自由度洛伦兹力微机电系统反射镜

IF 1.5 2区物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Micro/Nanolithography, MEMS, and MOEMS Pub Date : 2019-01-14 DOI:10.1117/1.JMM.18.1.015001

E. Afsharipour, Ramin Soltanzadeh, Byoungyoul Park, D. Chrusch, C. Shafai

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引用次数: 1

摘要

摘要提出了一种低功率三自由度扫描微镜。2 × 2毫米镜面是一个无平衡结构，由单晶微弹簧直接支撑。它由洛伦兹力驱动，能够在两个轴上倾斜，在第三个轴上有线性运动。分析了微镜的瞬态响应和频率响应。建立了描述系统动力学行为的拉格朗日运动方程，与实验结果吻合较好。在0.1 T磁场和20 ma电流作用下，所制备的微机电系统反射镜在y轴上以247.5 Hz的速度倾斜22.8°，在x轴上以292.7 Hz的速度倾斜13.3°。在谐振运行中，倾斜运动的功耗为2.6 mW。总直流驱动电流为110 mA，可实现232 μm的线性运动。

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Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications

Abstract. A low-power three-degree-of-freedom scanning micromirror is presented. The 2- × 2-mm mirror is a gimbaless structure, directly supported by single-crystal microsprings. It is actuated by Lorentz force and is able to tilt about two axes and has linear motion in a third-axis. The transient and frequency responses of the micromirror are analyzed. The Lagrange’s equations of motions describing the dynamic behavior of the system are presented and show a good agreement with the experimental results. The fabricated microelectromechanical system mirror demonstrates a tilt angle of 22.8 deg at 247.5 Hz about y-axis, and 13.3 deg at 292.7 Hz about x-axis, in a 0.1 T magnetic field and 20-mA current on the mirror. Power consumption is 2.6 mW of power in tilting motions in resonant operation. With a total DC-drive current of 110 mA, 232-μm linear motion is achieved.

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来源期刊

Journal of Micro/Nanolithography, MEMS, and MOEMS Multiple-

CiteScore

3.40

自引率

30.40%

发文量

审稿时长

6-12 weeks