Er和Yb飞秒激光诱导硅晶片上铟纳米结构的熔化和成形

Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics Pub Date : 2019-05-05 DOI:10.1364/CLEO_SI.2019.SF3G.1

A. Azarm, F. Akhoundi, N. Peyghambarian

{"title":"Er和Yb飞秒激光诱导硅晶片上铟纳米结构的熔化和成形","authors":"A. Azarm, F. Akhoundi, N. Peyghambarian","doi":"10.1364/CLEO_SI.2019.SF3G.1","DOIUrl":null,"url":null,"abstract":"We use erbium and ytterbium femtosecond lasers to melt and shape semi-spherical nanostructure by high spatial frequency laser induced periodic surface structures into linear microstructures of 2 μm long in the direction of laser polarization.","PeriodicalId":72688,"journal":{"name":"Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics","volume":"46 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2019-05-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Er and Yb femtosecond laser-induced melting and shaping of indium nanostructures on silicon wafers\",\"authors\":\"A. Azarm, F. Akhoundi, N. Peyghambarian\",\"doi\":\"10.1364/CLEO_SI.2019.SF3G.1\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We use erbium and ytterbium femtosecond lasers to melt and shape semi-spherical nanostructure by high spatial frequency laser induced periodic surface structures into linear microstructures of 2 μm long in the direction of laser polarization.\",\"PeriodicalId\":72688,\"journal\":{\"name\":\"Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics\",\"volume\":\"46 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-05-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/CLEO_SI.2019.SF3G.1\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/CLEO_SI.2019.SF3G.1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

利用铒和镱飞秒激光器，利用高空间频率激光诱导周期表面结构，沿激光偏振方向将半球形纳米结构熔化并成形为2 μm长的线性微结构。

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Er and Yb femtosecond laser-induced melting and shaping of indium nanostructures on silicon wafers

We use erbium and ytterbium femtosecond lasers to melt and shape semi-spherical nanostructure by high spatial frequency laser induced periodic surface structures into linear microstructures of 2 μm long in the direction of laser polarization.

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Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics

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