喷雾热解法制备Fe2O3和TiO2薄膜的结构和形态特性

Asia Hussein Kadhim, N. Hasan
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摘要

采用喷雾热解技术(SPT)在玻璃基板上制备了氧化铁fe2o3薄膜,并成功地将不同掺杂比例(1、3、5%)的二氧化钛tio2引入到薄膜中。采用x射线衍射分析和原子力显微镜(AFM)研究了tio2掺杂对沉积薄膜结构和形貌的影响。XRD结果表明,样品均为多晶,晶粒尺寸随tio2含量的增加而减小。所有薄膜的峰值都出现在(110)、(211)、(101)、(222)、(210)、(202)、(312)、(332)、(310)和(432)平面上,沿(211)方向优先。原子力显微镜(AFM)结果表明,随着掺杂比的增加,晶粒尺寸、粗糙度和均方根均减小。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Structural and Morphological Properties of Fe2O3 and TiO2:Fe2O3 Thin Films Prepared by Spray Pyrolysis Technique
Various doping percentage (1, 3 and 5 %) of titanium dioxide TiO 2 were successfully introduced into the iron oxide Fe 2 O 3 thin films obtained by spray pyrolysis technique (SPT) on a glass substrates. The effect of TiO 2 doping on structural and morphological properties of deposited thin films was studied by X-ray diffraction analysis and atomic forces microscope (AFM) respectively. XRD result showed that all samples are polycrystalline and the crystallite size decrease with increasing percentage of (TiO 2 ). All films have peaks appears at (110), (211), (101), (222), (210), (202), (312), (332), (310) and (432) planes with preferred orientation along (211). The (AFM) results shows that the grain size, roughness rate and the root mean square decreases with increasing dopant ratios .
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